I think quartz etches pretty well. The aditives in the glass / pyrex kill
the process. I think the chemistry is as a chalange as the hardware.
Shay
----- Original Message -----
From: 
To: "General MEMS discussion" 
Sent: Friday, January 16, 2004 1:54 AM
Subject: Re: [mems-talk] Ask for dry etching machine that can do soda
limeglass etching?


> This sounds like a great challange for the MEMS community. Why don't we
try to get a forum together to discuss ideas on how to dry etch pyrex,soda
lime glass, quartz ect. Let's try something like "The ideal dry etch tool
for etching pyrex ect would have the following hardware/process features."
>
> I would submit that the system must have an electrostatic helium backside
clamp capable of holding glass wafer with backside pressure of say 20 torr
and a gas flow of <1sccm
> Bob Henderson
>
> Next?????????
>
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