Hi,

Since your membrane is so thick, should it be treated as a thin-plate? How
about the intial stress in the device?  Except any theoretical formulas, you
may simulate it in  any FEM software to get the deflection.


Julie



----- Original Message -----
From: "Arti Tibrewala" 
To: 
Sent: Friday, January 16, 2004 9:56 AM
Subject: [mems-talk] deflection formula for cantilever


> Dear All, I have a membrane 24 microns thick, 3mm*3mm square. I used
> profilometer to get the deflection on it by applying 40mN force. I got a
> deflection of 40,000microns. I guess its huge and hence maybe its wrong. I
> want to calculate therotically the deflcetion of the membrane. I tried to
> get formula but unfortunately all are for pressure. Do anyone know a
formula
> to calculate deflection when force is applied? If yes please let me know.
> Thanks,
> Arti
>
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