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MEMSnet Home: MEMS-Talk: selective BSG etch & Si cleaning
selective BSG etch & Si cleaning
2004-01-17
Shrawan Jha
selective BSG etch & Si cleaning
Shrawan Jha
2004-01-17
Dear madam/sir,

This is to request you that I need a help regarding an appropriate cleaning
recipe suitable for GaN device process on Si wafers. Also I want to etch BSG on
SiO2 is there any suitabe recipe to etch BSG selectively?

Thanks and regards

skj


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