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KOH etching problems
2004-01-19
Luc Bijnens
2004-01-19
Z.,W.Y.(Lydia)
KOH etching problems
Luc Bijnens
2004-01-19
Dear Mems community

I have observed a large number of 'pyramids' of Si remaining on the etched
surface after anisotropic etching of 100 Si wafers with KOH.  Has anyone
experienced this before? What could have caused this?
Any help will be much appreciated

L Bijnens
Kentron South Africa




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