Hi we are interested in the planarization properties of BCB (cyclotone from
DOW). The specifications are that BCB has to be baked at 230º for around two
hours.
In our aplication this hard bake is not desired. We wonder what happends
during baking. Can we planarize features below the micron with a lower
temperature bake?
Any reference will be much apreciated.
Thanks in advance.

Manuscha Toronde