Dear MEMS-talkers,
I'm trying to make SOG wafer by anodic bonding and CMP.
Could you recommend me the Si wafer and glass for it?
I want to know the followings;
- kind of glass - I'm gonna try corning 7059 or 1737F.
- thickness of glass and Si wafer
- TTV level of Si wafer and glass
- other factors I should consider
Thank you
Lee, Duhyun
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[email protected]
Technology Innovation Center(TIC)
Dep. of Advanced Materials Eng.
Sungkyunkwan University, KOREA
Tel +82-31-290-5645
Fax +82-31-290-5644
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