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MEMSnet Home: MEMS-Talk: Need help with Polyimide process
Questions about Polyimide reflowing
2004-01-15
Xiaohui Li
SU-8 hydrophobic? or hydrophilic?
2004-01-16
sokwon Paik
Need help with Polyimide process
2004-01-20
Xiaohui Li
Need help with Polyimide process
Xiaohui Li
2004-01-20
> Hi,
>
> Did anyone try to reflow polyimide after patterning?  How does it work?
> Is there difficulty in reflowing polyimide?  Is there difference between
> photosentive and nonsensitive polyimide?
>
> Would reflowed polyimide be etched away by SU-8 developer?
>
>
> Thanks a lot,
>
>
> Xiaohui
>



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