A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: 1X 7 inch Mask Cleaning
1X 7 inch Mask Cleaning
2004-01-20
Purnendu Bikash Sahoo
2004-01-20
Mara Capovani
2004-01-20
[email protected]
1X 7 inch Mask Cleaning
Purnendu Bikash Sahoo
2004-01-20
We have 7 inch 1X mask of quartz and crome on it. We dont have any mask
cleaning system. We have tried to celan with acetone in room temp but
result was not so good.

Can you suggest typical mask cleaning procedure.


P B Sahoo


    |%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%|
    |                                                                    |
    |  PURNENDU BIKASH SAHOO                                             |
    |                                                                    |
    |  Sr. Engineer (VLSI:Fab.)         Email : [email protected]      |
    |                                                                    |
    |  Semiconductor Complex Ltd.       Phone : 0172-2237401(off),       |
    |  Sector 72, S.A.S Nagar-160071    Mobile: 09815704433              |
    |  (Near Chandigarh) Punjub                                          |
    |  www.sclindia.com                                                  |
    |%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%|





reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Tanner EDA by Mentor Graphics
MEMS Technology Review
Harrick Plasma, Inc.
Process Variations in Microsystems Manufacturing