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MEMSnet Home: MEMS-Talk: tmah photoresit developer used to etch Si
tmah photoresit developer used to etch Si
2004-01-20
GuyHaché
2004-01-20
Neal Ricks
tmah photoresit developer used to etch Si
GuyHaché
2004-01-20
Hi,

We have a bottle of tmah wich has photoresit developer written on it.  Can we
use this tmah to etch Si?

Is it possible that there's additives in it which could diminish the etch rate?

Thank's

Guy Haché, M.Sc.A.
Assistant de recherche, research assistant
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