Hello,

I've done some PDMS process with SU-8 as the mold. Two questions here,

(1) Is there any chemical that I can use as a PDMS remover to get rid of some
PDMS residue?
(2) SU-8 2100 is utilized and Nano XP is served for developing. Some white
residue can always be observed during rinse with IPA, does it mean that
developing hasn't finished. The developing time takes already 3 hours. BTW, some
white thin residue will be surround on top of the edge of the pattern as well,
is there any problem for exposure time?

Thanks much!

Yi-Ping Ho
Johns Hopkins University
PhD Student in Mechanical Engineering
123 Clark Hall, 3400 N. Charles Street
Baltimore, MD 21218, U.S.A.
Lab: 410-516-7576
Office: 410-516-4746