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MEMSnet Home: MEMS-Talk: Photoresist for dry etch stop
Photoresist for dry etch stop
2004-01-26
ashutosh dave
Photoresist for dry etch stop
ashutosh dave
2004-01-26
Hi all,

   I've been using SrTiO3 as a dry etch stop, but somehow I cannot use it
for the process. Is there any way i can use a photoresist layer and pattern
it before depositing the material (Nitride). How good would it work if
anyone has experimented it.


Aasutosh Dave

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