Hi,

You can go for a oxygen RIE.
Pancham.



>
>Message: 1
>Date: Mon, 26 Jan 2004 11:26:53 +0800 (HKT)
>From: "FENG Chun Hua" 
>Subject: [mems-talk] Patterning Teflon
>To: 
>Message-ID: <[email protected]>
>Content-Type: text/plain; charset=iso-8859-1
>
>Dear all,
>   May somebody have experience of patterning an dielectric layer like
>Teflon AF? Your kind help will be greatly appreciated.
>
>Regards
>Allen