Hi Chenyan
It´s not possible to etch glass by deep RIE with a "normal" dry etching system.
Deep RIE process is well working for Silicon. I do etch cavities 2-3 microns
deep into
glass wafers with CHF3 and CF4 chemistry. It works for cavities but the etched
surface
is very rough and the selectivity to Photoresist is poor; about 2:1 (Glass:PR).
As far as I know the magnufacturers of dry etching systems (STS, Alcatel, Oxford
......) are
working on systems for deep glass etching. Ask them for further information.

Greetings
Stefan

-----Original Message-----
From: [email protected] [mailto:mems-talk-
[email protected]] On Behalf Of Chen Yan
Sent: Donnerstag, 29. Januar 2004 08:06
To: [email protected]
Subject: [mems-talk] BOSCH recipe



I am trying to do deep etch with RIE machine, anybody know any 'BOSCH' recipe?
My substrate is glass and protection layer is resist. (eg. how much is RF power
to generate polymer protection layer for deep etching?)

Thank you & Regards,
chenyan


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