Dear MEMS researchers,

I am looking for 200mm or100mm glass substrate that transmit 80% of light at
193nm.
Does anyone know which kind of glass must be used ?
Do you know a supplier for this kind of product ?

Thanks a lot.

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David PEYRADE

CNRS-LTM
CEA LETI
Bat.4120 p 220
17, rue des Martyrs
38054 Grenoble Cedex 9
Bat4120 Pièce 204
Tel:  33 (0)4 38 78 38 82
Fax:  33 (0)4 38 78 58 92
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