Dear David,

you should use fused silica if you need a high transmission at 193 nm.

Plan Optik GmbH in Germany can offer different sizes and specifications from
this and other materials. Please contact me directly.

Best regards,

Carsten Wesselkamp
Plan Optik GmbH
Unter den Eichen
56479 Elsoff
Germany

Tel.: +49-2664-5068-25
Fax: +49-2664-5068-91
mailto:[email protected]
http://www.planoptik.com


------------------------------

Date: Wed, 4 Feb 2004 15:48:43 +0100
From: PEYRADE David 
Subject: [mems-talk] Glass substrate supplier
To: "'[email protected]'" 
Message-ID: <2BB01BDE390BD611A2D10002A52C32D803CC82E2@SRV-MAIL2>
Content-Type: text/plain;       charset="iso-8859-1"

Dear MEMS researchers,

I am looking for 200mm or100mm glass substrate that transmit 80% of light at
193nm.
Does anyone know which kind of glass must be used ?
Do you know a supplier for this kind of product ?

Thanks a lot.

________________________

David PEYRADE

CNRS-LTM
CEA LETI
Bat.4120 p 220
17, rue des Martyrs
38054 Grenoble Cedex 9
Bat4120 Pièce 204
Tel:  33 (0)4 38 78 38 82
Fax:  33 (0)4 38 78 58 92
________________________



------------------------------

Message: 9
Date: Wed, 4 Feb 2004 09:47:05 -0700
From: "Hunter, Luke L" 
Subject: RE: [mems-talk] Quickly dissolving thick PMMA
To: "'General MEMS discussion'" 
Message-ID:
        <[email protected]>
Content-Type: text/plain


Thanks for all the good suggestions.  The PMMA that's being dissolved is a
LIGA mold with metal parts in it, so we'll want to try things that won't
attack metal.  Co-workers are trying a few things now and I'll post results
once we know more.




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End of MEMS-talk Digest, Vol 16, Issue 4
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