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MEMSnet Home: MEMS-Talk: Does concentrated HF etch Au
Does concentrated HF etch Au
2004-02-16
li Yu
2004-02-16
David Nemeth
2004-02-16
Jing Liu
2004-02-16
Tres Brooks
2004-02-16
[email protected]
Does concentrated HF etch Au
Tres Brooks
2004-02-16
You should be fine.  If there are any pin holes in the gold then the HF will
find a way to the substrate but if your coating is uniform you should have no
problems.

Tres

-----Original Message-----
From: li Yu [mailto:[email protected]]
Sent: Sunday, February 15, 2004 9:14 PM
To: [email protected]
Subject: [mems-talk] Does concentrated HF etch Au


I want to put a wafer with 2000A Au in 49% HF for 30 minute, Is that Ok? Thanks
in advance.
 Lili


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