Hi,

I have achieved a 45 microns/hour Si etch rate with TMAH (thank's to all your
answers).

In order to keep an etch rate over 30 microns/hour, when should I do another
TMAH solution?

I would also like to know if the TMAH attacks Nickel?

Thank's


Guy Haché, M.Sc.A.
Assistant de recherche, research assistant
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Département de génie électrique et de génie informatique
Université de Sherbrooke
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Téléphone/phone : (819) 821-8000 3706
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