Aditya:

You can use ANSYS Multiphysics.

Regards.

Daniel Shaw
ANSYS, Inc.
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-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of
Aditya Neelakanta Belwadi
Sent: Monday, February 23, 2004 12:15 AM
To: [email protected]
Subject: [mems-talk] CAD Software for MEMS


Hi,
I wanted to know which software is used to perform FEA
analysis on mems components. I use hypermesh along with MSC
Nastran and do not find it stable for micro dimensions.
Thanks,
Aditya Belwadi
Graduate Student
Wayne State University

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