Aasutosh,

If you are sputtering with a partial pressure of N2 you could change some of the
Ti to TiN at the surface - you might want to try using a thin protective layer.
Thanks,

Greg Miller
KVH Industries
Email: [email protected]


-----Original Message-----
From: aasutosh dave [mailto:[email protected]]
Sent: Friday, February 27, 2004 2:45 AM
To: [email protected]
Subject: [mems-talk] Resistance for Ti



Hello,

  I am having problem with Ti resistance bellow thick nitride. The Ti arms
are 0.16 um thick and open at edges.Silicon nitride is then sputtered ~ 1um
on top of it.  Does the thick nitride deposition on top of Ti affect its
resistance or affect its charateristic? The Ti arm lenght is ~ 200 um.


Thanks,

Aasutosh Dave


NanoFab Center
Arlington, Texas

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