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MEMSnet Home: MEMS-Talk: oxide wet etch on ito
oxide wet etch on ito
2004-03-02
jo ed
2004-03-02
Mighty Platypus
2004-03-02
ROSTAING Cedric 177671
2004-03-03
William Lanford-Crick
oxide wet etch on ito
jo ed
2004-03-02
Hello

I have a substrate coated with ito followed by oxide.
Does anyone know of a selective wet etch process to
remove the oxide put keep the ito?

cheers,
Jo

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