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MEMSnet Home: MEMS-Talk: evaporation of nickel on nitride
evaporation of nickel on nitride
2004-03-02
GuyHaché
2004-03-03
Kirt Williams
2004-03-03
William Lanford-Crick
2004-03-03
Phillipe Tabada
2004-03-04
ROSTAING Cedric 177671
evaporation of nickel on nitride
GuyHaché
2004-03-02
Hi,

We want to evaporate Nickel on Nitride (vacuum of 10-5 before evaporation), but
we have some problems with adhesion.  When we do the lift-off, the nickel
doesn't stick.  So my first question would be, is Nickel suppose to stick to
Nitride?  If so, how could I have better adherence?

Thank's

Guy Haché, M.Sc.A.
Assistant de recherche, research assistant
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Département de génie électrique et de génie informatique
Université de Sherbrooke
2500, boulevard Université
Sherbrooke (Québec) Canada
J1K 2R1
Téléphone/phone : (819) 821-8000 3772
Télécopieur/fax : (819) 821-7937
e-mail: [email protected]
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