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MEMSnet Home: MEMS-Talk: evaporation of nickel on nitride
evaporation of nickel on nitride
2004-03-02
GuyHaché
2004-03-03
Kirt Williams
2004-03-03
William Lanford-Crick
2004-03-03
Phillipe Tabada
2004-03-04
ROSTAING Cedric 177671
evaporation of nickel on nitride
Kirt Williams
2004-03-03
Nickel is a semi-noble metal and does not react much with the underlying
material.
Like Au, Pt, Pd, and others, it needs an adhesion layer.
Use 50-200 A of Cr, Ti, or TiW.
    --Kirt Williams

----- Original Message -----
From: "Guy Haché" 
To: 
Sent: Tuesday, March 02, 2004 12:01 PM
Subject: [mems-talk] evaporation of nickel on nitride


> Hi,
>
> We want to evaporate Nickel on Nitride (vacuum of 10-5 before
evaporation), but
> we have some problems with adhesion.  When we do the lift-off, the nickel
> doesn't stick.  So my first question would be, is Nickel suppose to stick
to
> Nitride?  If so, how could I have better adherence?
>
> Thank's
>
> Guy Haché, M.Sc.A.
> Assistant de recherche, research assistant



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