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MEMSnet Home: MEMS-Talk: SU-8 on strong acid
SU-8 on strong acid
2004-03-04
Haroon Lais
SU-8 on strong acid
Haroon Lais
2004-03-04
Hello all,

Do anyone know that SU-8 can stand strong acid like HF, HNA ?

I want to use the SU-8 as the mask layer on patterning Silicon.
also, do anyone know what kind of polymer will stand on strong acid like HF, or
HNA?

thank you,
Haroon


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