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MEMSnet Home: MEMS-Talk: Metal Spitting
Metal Spitting
2004-03-18
J W
2004-03-18
Brent Garber (2 parts)
2004-03-18
newman
2004-03-26
Jeff Simkins [simkinjr]
2004-03-26
Buncick, Milan (Contractor-AEgis TG)
2004-03-28
[email protected]
Metal Spitting
J W
2004-03-18
Hi,

I'm trying to deposit gold using Ebeam evaporation,
but kept having metal spitting problems.  I tried to
change the equipment running conditions like longer
soak time, soak power close to deposition power,
altering beam sweeping pattern.  Sometime it improves
and other time it doesn't.  Are there any other
factors that needs to be considered to get rid of the
spitting?

Thanks!
J.W.

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