Heres a buncha links:

Hope they help!

Monica

http://www.mrc.utexas.edu/NSFWorkshop/Presentations/varadan1.pdf

http://www.ee.ucla.edu/~jjudy/publications/conference/transducers_1999_zee_judy.
pdf

http://www.sandia.gov/materials/sciences/factsheets/PolySynthProcChar.html





 --- On Tue 03/23, Nagarajan < [email protected] > wrote:

From: Nagarajan [mailto: [email protected]]

To: [email protected]

Date: Tue, 23 Mar 2004 09:36:15 -0800 (PST)

Subject: [mems-talk] Polymer deposition???



Dear all,
 
Iam nagarajan, doing Masters in mechanical Engg in concordia
univ, montreal. Iam in the process of developing a fabrication process for a
piezoelectric tactile sensor.
 
 The sensor design is like this....


It consists of a PVDF material embedded between two silicon layers. There
are two cylinders over the substrate, one surrounding the other. The inner
cylinder is made of a rigid material and the outer one of a soft material. Iam
planning to use polysilicon for the inner cylinder and a polymer
for(PMMA,polyimide) the outer one.
 
Has anyone previously tried polymer
deposition and patterning it to cylindrical shape.Can anyone help me in this
regard to how can a polymer be deposited and patterend into cylindrical form,
with the inner cylinder being a polysilicon.
 
Thanking you all in
advance,
 
Regards
 
 


NAGARAJAN N.B 
1845,de
MAISSONNEUVE WEST 
APARTMENT NO 21 
MONTREAL,QUEBEC 
CANADA - H3H1J9

PH NO- 001-514-937 8454

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