Hello Megan,

You'll find many information on the webpage of microchem
(www.microchem.com).
They have datasheets and a FAQ list on his page for SU8.

Best regards

Michael Jacobs
______________________
SUSS MicroTec
Application Center RSC Europe

Michael Jacobs
Applications Engineer
Schleissheimer Strasse 90
85748 Garching
Germany

Fon     +49 89 32007 - 363
Fax     +49 89 32007 - 390
email   [email protected]



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Von: [email protected]
[mailto:[email protected]]
Hello,

My name is Megan and I'm a college student doing a research project
involving photo-lithography.  I need to spin layers of SU-8 5 onto silicone
dioxide.  The SU-8 layers need to be 1, 4, 5, 10 and 20 micrometers
thick.  Can anyone provide me with (or point me in the direction of)
information about spin speeds and times to get the desired thicknesses?

Also, if anyone has any suggestions as to things to avoid, the best way to
do this, baking times, etc. that would be greatly appreciated as well.

Thanks in advance for your help,

Megan
[email protected]