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MEMSnet Home: MEMS-Talk: Polyethylene deposition on Si
Polyethylene deposition on Si
2004-03-26
Nagarajan
Polyethylene deposition on Si
Nagarajan
2004-03-26
Hi, all

Does anyone have experience on processing techniques
for apply layer of polyethylene or polypropylene
materials on silicon wafers. The issues I want to know
include:

1. What type of process I can use? Can I use spin-on
just like for applying photoresist or polyimide?

2. Is there any suppliers of the polyethylene and
polypropylene for MEMS applications?

3. It will be highly appreciated if you can provide
some references.

Thank you very much.Eagerly awaiting for a reply.

Regards,





=====
NAGARAJAN N.B
1845,de MAISSONNEUVE WEST
APARTMENT NO 21
MONTREAL,QUEBEC
CANADA - H3H1J9
PH NO- 001-514-937 8454


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