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MEMSnet Home: MEMS-Talk: anodic bonding with porous silicon and pyrex
anodic bonding with porous silicon and pyrex
2004-03-26
Emeline MERY
anodic bonding with porous silicon and pyrex
Emeline MERY
2004-03-26
Hello,

I would like to know if someone has already done anodic bonding with
porous silicon and pyrex. Does it function like si / pyrex anodic
bonding or conditions must be changed?

all the best,

Emeline MERY

Doctorante
Laboratoire de Physique de la Matière (LPM)
UMR CNRS 5511
INSA de Lyon
7 avenue Jean Capelle, bât. Blaise Pascal
69621 VILLEURBANNE CEDEX
FRANCE
Tél. : (33) 4 72 43 87 95
Fax : (33) 4 72 43 60 82




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