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MEMSnet Home: MEMS-Talk: Electrophoretic Deposition (EPD) of PZT
Electrophoretic Deposition (EPD) of PZT
2004-03-28
Qing Yao
Electrophoretic Deposition (EPD) of PZT
Qing Yao
2004-03-28
Hi,

I was wondering if someone has done electrophoretic depostion of PZT. I need
to deposit a pretty thick PZT film as a piezoelectric actuator. I did some
literature research and it seems that electrophoretic deposition is the best
and fastest way to get a thick PZT film. Would you please give me some
advices or tips about the process? Thanks!




Best Regards,


Qing Yao
___________________
M&IE @ UIUC



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