Positive photoresists can be used to pattern a reverse polarity image by a
generally accepted image reversal process detailed in the following link.  I
have tried the ammonia process and it works but you will need some optimization
to get decent sidewall profile.

See link: http://www.yieldengineering.com/products/pdf/imagereversal.pdf

Loren St. Clair

 -----Original Message-----
From:   William Lanford-Crick [mailto:[email protected]]
Sent:   Friday, April 02, 2004 12:16 PM
To:     [email protected]
Subject:        [mems-talk] 1813 image reversal?

Hi,
Does anyone have an image reversal process for 1813
photoresist?

Thanks!
Bill

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