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MEMSnet Home: MEMS-Talk: oxide wet etch on ito
oxide wet etch on ito
2004-04-04
vijay j
oxide wet etch on ito
vijay j
2004-04-04
hai,
     you can try hf no

regarding,
vijay.

jo ed  wrote:
Hello

I have a substrate coated with ito followed by oxide.
Does anyone know of a selective wet etch process to
remove the oxide put keep the ito?

cheers,
Jo

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