Hi everybody,
We recently purchased an aluminium target for the companys rather old Leybold-
Heraeus (model Z 400 I think) sputtering system. The problem is I can´t find
working sputtering parameters for it. Either there is no aluminium coating on
the test wafer at all or then the coating is of very dark colour. The process
looks OK when I look through the small windows on the chamber walls. I´ve tried
varying sputtering pressure and voltage. Any ideas or suggestions would be
greatly appreciated.
Best regards
Tomi Meilahti
Metorex International Oy
Nihtisillankuja 5
02631 Espoo
Puh: 09 32941316
Fax: 09 32941301
E-mail: [email protected]