Hello  Tomi

        I suppose some kind of arcing may be there in your system whil
sputtering Aluminium. Possibly some contamination or gap between target
and substrate. So you need to look for that matter also.

At what pressure/volatge you are working?

hope it will help u.

good luck

kamal







     Kamal Kishore                     Phone :(0172) 2237401 to 10
     Engineer,VLSI:FAB                 Ext:576,550,570,441
     Semiconductor Complex Limited.    Fax:(0172)-2236378,2236885
     Sector 72(Indl.Area),S A S Nagar,
     Mohali, Punjab- 160071




On Mon, 5 Apr 2004 [email protected] wrote:

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