I expect Aluminum will work (etch in KOH), possibly chrome.
Both of these are easy to deposit by evaporation.
-Bill
---- Original message ----
>Date: Tue, 6 Apr 2004 15:35:14 -0400
>From: Patrick Poissant
>Subject: [mems-talk] metals search
>To: [email protected]
>
>Hello,
>
>I want first thank all of you who help me with the SU8 spin-
coat.
>
>I'm searching for a metal that I can etch without etching
electroplated nickel.
>This metal will be evaported on photo resist and should not
crack.
>
>Best regards,
>
>Patrick Poissant
>___________________________________________________