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MEMSnet Home: MEMS-Talk: Sb (antimony) doped Si
Sb (antimony) doped Si
2004-04-11
SLU
Sb (antimony) doped Si
SLU
2004-04-11
Hello, Does anybody know if the electrothermal properties of Sb doped Si
is very different from Boron ( or Phorsphorous) doped Si, say with the same
resistivity? I'm going to do a study of thermal actuator, but don't know if
the type of dopant is critical. Thank you very much for your attention.

Lu



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