Hello,

To understand the encountered wrinkles on SU-8 more precisely, I would be, in
fact, more interested to know the thickness of your sputtered gold film, and
also the distribution of the observed wrinkles.

Did they occurred in the developed and hence etched gold area? How is your gold
pattern look like?

regards

Han Chong

>>Date:         Fri, 9 Apr 2004 10:50:04 -0700 (PDT)
>>From:         Leidong Mao  [add to >>address book]
[protect or block sender]
>>Subject:      [mems-talk] SU-8 wrinkles after bake
>>To:   [email protected]
>>Reply To:     General MEMS discussion >>

>>Hello all,

>>    We met a SU-8 wrinkle problem and would like to
>>hear any suggestion. The process is to pattern gold on
>>the un-exposed SU-8 resist. We first piranha etched
>>the glass slides and baked it for 1hr@200C. The
>>spun-on SU-8 resist looked good after soft bake. Then
>>gold was sputtered onto the resist, and it was
>>patterned by using Shipley 1813 positive resist. After
>>that, the gold was etched in Transene gold etchant TFA
>>(a complex of KI/I2), rinsed in DI water, baked at 90C
>>for 30 mins. The wrinkles showed up during the baking.
>>Does anyone have the same experience? Any suggestion
>>welcomed.



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