Tadaa! Success! Thank you all for ideas and suggestions. Especially you Jin.
I did what you suggested and it seems to have done the trick.
----- Original Message -----
From: "Jin Zheng" 
To: 
Sent: Monday, April 05, 2004 7:18 PM
Subject: problem with aluminium sputtering


> Tomi,
>
> The dark color usually indicates high base pressure and no coating
> usually is related with too Ar pressure.  Try to reduce both the base
> pressure and the process pressure.
>
> Regards,
>
> Jin
>
> --
>
> Jin Zheng
> Michigan Technological University
> 121 EERC Building, 1400 Townsend Dr.
> Houghton, MI 49931
> Tel:(906)487-2550
> Fax:(906)487-2949
>
>
>