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MEMSnet Home: MEMS-Talk: Iodidric acid question wet etching
Iodidric acid question wet etching
2004-04-16
Giovanni Morelli
2004-04-16
philip.lau
Iodidric acid question wet etching
Giovanni Morelli
2004-04-16
Dear All,

can someone confirm me if a wet etching with HI 47% (Iodidric acid) is
compatible with CMOS tecnology ??
I have to perform particular cleaning procedure after this etching??

Thanks in advance

Giovanni Morelli




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