Dear all,

I am using SU8-2005. I have a problem just after developing. I see some cracks
on the corners of my patterns while I do not have those cracks before
developing. I appreciate to let me know if anybody knows why. Here is my
condition:

1- RPM= 2000rpm,
2- 65'c softbake time= 1 min,
3- 95'c softbake time= 2 min,
4- Exp. time= 7sec,
5- 65c PEB time= 1 min,
6- 95c PEB time= 5 min,(I choose this time because of adhesion problem I had if
I use 1 min),
7- wait for about 5 min.
8- Dev. time= 1 min,
9- IPA time= 1min,

I heard that IPA make that problem but I have tried without IPA and I still
have the problem.


Best regards,
Hasan Sharifi