Hello Group!

Can you tell me some general references on VLSI-MEMS please.
Who is working on the subject presently? What prospects do you think it
has for the future?

I personally think it will usher the future just as VLSI replaced discrete
transistors.

Thanks
Samir

--
Samir Kagadkar
Deptt. of Electrical Engineering,
Indian Institute of Technology, Bombay