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MEMSnet Home: MEMS-Talk: Teflon Patterning
Teflon Patterning
2004-04-22
Dohyun Kim
Teflon Patterning
Dohyun Kim
2004-04-22
Hi, Ya'all.



 I know Teflon can be patterned with successive pr coating and etching in
oxygen plasma. Is there anybody who knows other ways to pattern Teflon(i.e.
dedicated developer, solvent.)


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