I did some work on the maximum strain that can withstand SiGe layers for
optical application. You can find some of it in:
Appl. Phys. Lett. 75, 2232 (1999) and check the references there.

Hope it helps.
Diego Krapf

----- Original Message -----
From: "bearren111111111" 
To: 
Sent: Tuesday, April 27, 2004 2:10 PM
Subject: [mems-talk] please help me about mems!!!


> I am a student of China,I want to known the maximum strain of epitaxy
silicon film .It is so important to me,so if you can please help me!
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