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MEMSnet Home: MEMS-Talk: {111}-plane mirror by KOH-etching
{111}-plane mirror by KOH-etching
2004-04-27
Armin Werber
2004-04-27
manjula raman
2004-04-28
Ashwin Seshadri
{111}-plane mirror by KOH-etching
Ashwin Seshadri
2004-04-28
Hey,

I found that 45% KOH was ideal for obtaining a decent surface. 85 degrees
should be fine. Make sure the stirring rate is high so that the etch
byproducts are dispersed.


Ashwin Seshadri
Graduate research Assistant
Material Science Dept.
Univ. of Texas at Arlington

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