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MEMSnet Home: MEMS-Talk: Tapering SU-8 in z-axis
Tapering SU-8 in z-axis
2004-04-29
Michael L
2004-04-29
Brubaker Chad
Tapering SU-8 in z-axis
Michael L
2004-04-29
Hello,

Does anyone know of a simple method for vertically tapering SU-8? I have
heard of people who have achieved this, but haven't seen anything mentioned
in the literature.

Regards,

Michael

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