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MEMSnet Home: MEMS-Talk: Re: SU8 Adhesion to Si
Re: SU8 Adhesion to Si
2004-05-15
chong hanwoo
2004-05-15
Gabriel Dagani
2004-05-17
Greg Reimann
2004-05-17
Brubaker Chad
2004-05-17
Gabriel Dagani
Re: SU8 Adhesion to Si
Gabriel Dagani
2004-05-15
The SiO2 is currently present on the wafer.
Would the adhesion benefit from HMDS or perhaps a YES oven
process?

 - thanks - Gabe


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