Dear colleagues,

I'm looking for a stress measurement system.
The application is to measure stress in thin metallic and insulating
films on 4" Si-Wafers at temperatures between 20 C and 650 C. I know
about the TENCOR FLX 2900/2908, but is there another offerer or a
second-hand measuring instrument?

Regards,

Uwe Storm

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Uwe Storm
Institute for Microsensors, -actuators and -systems
University of Bremen FB 1
P.O. Box 330 440
D - 28334 Bremen
e-mail: [email protected]
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