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MEMSnet Home: MEMS-Talk: Etching Tantalum-Rhenium and Rhenium
Etching Tantalum-Rhenium and Rhenium
2004-06-14
chong hanwoo
Etching Tantalum-Rhenium and Rhenium
chong hanwoo
2004-06-14
Hi,

Does anyone has experience on wet etching Tantalum-Rhenium (Ta-Re) thin film
formed by means of co-sputtering of Ta and Re?

Also, is there any convenient way to wet etch Re or Ta-Re without damaging
Tungsten Carbide?

thanks

Han


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