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MEMSnet Home: MEMS-Talk: would like to post a question on MEMS-talk
would like to post a question on MEMS-talk
2004-06-14
Vorrada Loryuenyong
would like to post a question on MEMS-talk
Vorrada Loryuenyong
2004-06-14
Hi,

I want to fill a deep trench in patterned silicon wafer with material that can
withstand temperatures as high as 400C.
The depth and width will be around 300 micron and 300 micron, respectively.
Does anybody know which process is available for that?

Thank you.

Best regards,
Vorrada

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