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MEMSnet Home: MEMS-Talk: tapered SU-8 structure
tapered SU-8 structure
2004-06-21
annuar
2004-06-21
Michael L
tapered SU-8 structure
annuar
2004-06-21
Dear all,

I'm thinking of making tapered structure on SU-8. SU-8 usually gives a very
good vertical structured component. However, I wanted to make SU-8 structure
to be taper with a certain degree of angle, say 45 degrees. Has anyone ever
try making such structure using SU-8?

Thanks.
Abang Annuar Ehsan
Photonics Tech. Lab
Institute of Micro Engineering and Nanoelectronics (IMEN)
Universiti Kebangsaan Malaysia (UKM)
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