Hello,

We used mixture of CCL4 and CF4 to do gold dry etch, but recently it doesn't
work. It seems CCL4 run out. We contacted Scott Specialty Gases to order CCL4.
The company told us their cylinder will not have a diptube or pressure pad and
we have to invert the cylinder to reomve the product. We know that means CCL4 is
liquid phase in cylinder. When we took our old CCL4 cylinder out from system, we
found there is stiil liquid inside. We let the cylinder upside down and connectd
to system again, liquid CCL4 come out and MFC out of control.

We would like to know how to deal with this situation to have gas phase CCL4? We
are appreciated your help.

Yun